diff --git a/.github/workflows/release.yml b/.github/workflows/release.yml
index 93a84925..6cab971e 100644
--- a/.github/workflows/release.yml
+++ b/.github/workflows/release.yml
@@ -5,52 +5,28 @@ on:
     types: [created]
 
 jobs:
-  deploy-wheels:
-    name: Deploy wheels on ${{ matrix.os }} for ${{ matrix.arch }}
+  deploy-wheels-linux:
+    name: Deploy wheels on Linux for ${{ matrix.arch }}
     runs-on: ${{ matrix.os }}
     strategy:
       matrix:
-        os: [ubuntu-latest, macos-latest, windows-latest]
+        os: [ubuntu-latest]
         python-version: [38, 39, 310, 311, 312]
-        manylinux-image: [manylinux2014, manylinux_2_24]
-        arch: [auto]
-        include:
-          - os: ubuntu-latest
-            manylinux-image: manylinux2014
-            arch: aarch64
-            python-version: 38
-          - os: ubuntu-latest
-            manylinux-image: manylinux2014
-            arch: aarch64
-            python-version: 39
-          - os: ubuntu-latest
-            manylinux-image: manylinux2014
-            arch: aarch64
-            python-version: 310
-          - os: ubuntu-latest
-            manylinux-image: manylinux2014
-            arch: aarch64
-            python-version: 311
-          - os: ubuntu-latest
-            manylinux-image: manylinux2014
-            arch: aarch64
-            python-version: 312
-        exclude:
-          # manyliunx image is not a valid variation on MacOS and Windows
-          - os: macos-latest
-            manylinux-image: manylinux2014
-          - os: windows-latest
-            manylinux-image: manylinux2014
+        manylinux-image: [manylinux2014]
+        arch: [auto, aarch64]
 
     steps:
       - uses: actions/checkout@v3
+
       - name: Set up QEMU
         if: ${{ matrix.arch == 'aarch64' }}
         uses: docker/setup-qemu-action@v1
+
       - name: Set up Python
         uses: actions/setup-python@v4
         with:
           python-version: 3.9
+
       - name: Install dependencies
         run: |
           python -m pip install --upgrade pip
@@ -64,10 +40,47 @@ jobs:
         env:
           CIBW_BUILD: 'cp${{ matrix.python-version }}-*'
           CIBW_SKIP: '*musllinux*'
-          CIBW_ARCHS: ${{matrix.arch}}
+          CIBW_ARCHS: ${{ matrix.arch }}
           CIBW_MANYLINUX_*_IMAGE: ${{ matrix.manylinux-image }}
           CIBW_MANYLINUX_I686_IMAGE: ${{ matrix.manylinux-image }}
 
+      - name: Publish wheels to PyPI Unix
+        continue-on-error: true
+        env:
+          TWINE_USERNAME: ${{ secrets.PYPI_USERNAME }}
+          TWINE_PASSWORD: ${{ secrets.PYPI_PASSWORD }}
+        run: |
+          twine upload wheelhouse/*.whl
+
+  deploy-wheels-macos-windows:
+    name: Deploy wheels on ${{ matrix.os }}
+    runs-on: ${{ matrix.os }}
+    strategy:
+      matrix:
+        os: [macos-latest, windows-latest]
+        python-version: [38, 39, 310, 311, 312]
+
+    steps:
+      - uses: actions/checkout@v3
+
+      - name: Set up Python
+        uses: actions/setup-python@v4
+        with:
+          python-version: 3.9
+
+      - name: Install dependencies
+        run: |
+          python -m pip install --upgrade pip
+          pip install build twine flake8 setuptools wheel
+
+      - name: Install cibuildwheel
+        run: python -m pip install cibuildwheel -U
+
+      - name: Build wheels
+        run: python -m cibuildwheel --output-dir wheelhouse
+        env:
+          CIBW_BUILD: 'cp${{ matrix.python-version }}-*'
+
       - name: Publish wheels to PyPI Unix
         if: matrix.os != 'windows-latest' 
         continue-on-error: true
diff --git a/.github/workflows/wheels.yml b/.github/workflows/wheels.yml
new file mode 100644
index 00000000..bcb471df
--- /dev/null
+++ b/.github/workflows/wheels.yml
@@ -0,0 +1,70 @@
+name: wheels
+
+on:
+  push:
+    branches: [ master ]
+  pull_request:
+
+jobs:
+  build-wheels-linux:
+    name: Build wheels on Linux for ${{ matrix.arch }}
+    runs-on: ${{ matrix.os }}
+    strategy:
+      matrix:
+        os: [ubuntu-latest]
+        python-version: [38, 39, 310, 311, 312]
+        manylinux-image: [manylinux2014]
+        arch: [auto, aarch64]
+
+    steps:
+      - uses: actions/checkout@v3
+      - name: Set up QEMU
+        if: ${{ matrix.arch == 'aarch64' }}
+        uses: docker/setup-qemu-action@v1
+      - name: Set up Python
+        uses: actions/setup-python@v4
+        with:
+          python-version: 3.9
+      - name: Install dependencies
+        run: |
+          python -m pip install --upgrade pip
+          pip install build twine flake8 setuptools wheel
+
+      - name: Install cibuildwheel
+        run: python -m pip install cibuildwheel -U
+
+      - name: Build wheels
+        run: python -m cibuildwheel --output-dir wheelhouse
+        env:
+          CIBW_BUILD: 'cp${{ matrix.python-version }}-*'
+          CIBW_SKIP: '*musllinux*'
+          CIBW_ARCHS: ${{ matrix.arch }}
+          CIBW_MANYLINUX_*_IMAGE: ${{ matrix.manylinux-image }}
+          CIBW_MANYLINUX_I686_IMAGE: ${{ matrix.manylinux-image }}
+
+  build-wheels-macos-windows:
+    name: Build wheels on ${{ matrix.os }}
+    runs-on: ${{ matrix.os }}
+    strategy:
+      matrix:
+        os: [macos-latest, windows-latest]
+        python-version: [38, 39, 310, 311, 312]
+
+    steps:
+      - uses: actions/checkout@v3
+      - name: Set up Python
+        uses: actions/setup-python@v4
+        with:
+          python-version: 3.9
+      - name: Install dependencies
+        run: |
+          python -m pip install --upgrade pip
+          pip install build twine flake8 setuptools wheel
+
+      - name: Install cibuildwheel
+        run: python -m pip install cibuildwheel -U
+
+      - name: Build wheels
+        run: python -m cibuildwheel --output-dir wheelhouse
+        env:
+          CIBW_BUILD: 'cp${{ matrix.python-version }}-*'
diff --git a/MANIFEST.in b/MANIFEST.in
index a8d58476..53526611 100644
--- a/MANIFEST.in
+++ b/MANIFEST.in
@@ -6,4 +6,4 @@ include setup.py
 recursive-include src/viztracer/html *.css *.js
 recursive-include src/viztracer/modules *.c *.h
 recursive-include src/viztracer/web_dist *
-recursive-include src/viztracer/attach_process *
+recursive-include src/viztracer/attach_process *.py
diff --git a/setup.py b/setup.py
index 0919f78d..9b118dee 100644
--- a/setup.py
+++ b/setup.py
@@ -18,10 +18,18 @@
     ],
 }
 
+if sys.platform == "win32":
+    package_data["viztracer"].extend([
+        "attach_process/attach_x86.dll",
+        "attach_process/attach_x86_64.dll",
+        "attach_process/inject_dll.exe",
+        "attach_process/inject_dll_amd64.exe",
+        "attach_process/run_code_on_dllmain_amd64.dll",
+        "attach_process/run_code_on_dllmain_x86.dll",
+    ])
 if sys.platform == "darwin":
     package_data["viztracer"].extend([
         "attach_process/attach_x86_64.dylib",
-        "attach_process/linux_and_mac/lldb_prepare.py",
     ])
 elif sys.platform in ("linux", "linux2"):
     if platform.machine() == "i686":
diff --git a/src/viztracer/attach_process/attach_linux_amd64.so b/src/viztracer/attach_process/attach_linux_amd64.so
index 2aa79932..30464f23 100755
Binary files a/src/viztracer/attach_process/attach_linux_amd64.so and b/src/viztracer/attach_process/attach_linux_amd64.so differ